Full-field microimaging with 8 keV X-rays achieves a spatial resolutions better than 20 nm.
نویسندگان
چکیده
Fresnel zone plates (450 nm thick Au, 25 nm outermost zone width) used as objective lenses in a full field transmission reached a spatial resolution better than 20 nm and 1.5% efficiency with 8 keV photons. Zernike phase contrast was also realized without compromising the resolution. These are very significant achievements in the rapid progress of high-aspect-ratio zone plate fabrication by combined electron beam lithography and electrodeposition.
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عنوان ژورنال:
- Optics express
دوره 19 21 شماره
صفحات -
تاریخ انتشار 2011